High-resolution vibrational electron-energy-loss spectroscopy has been used to study the interaction of ${\mathrm{NH}}_3$ with the Si(100)-(2×1) surface. ${\mathrm{NH}}_3$ is decomposed on the Si(100) surface at 300 K to form the ${\mathrm{SiNH}}_2$ and SiH species. It is proposed that the amino (${\mathrm{NH}}_2$) species is bonded to the dangling bond of the Si(100) surface atom. Changes in the adsorbed state of both species under heat treatment are discussed.

• Received 4 January 1989

DOI:https://doi.org/10.1103/PhysRevB.39.12918