精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
光学的方法による小穴内径測定装置の開発
丸山 六男尾坂 一小野 道彦賀勢 晋司
著者情報
ジャーナル フリー

1996 年 62 巻 1 号 p. 145-149

詳細
抄録

This paper presents an optical apparatus for measuring small hole diameter. The apparatus, basing on the principle of geometrical optics, enables to measure diameters of through holes with high aspect ratios. The measuring range is 0.1-1mm. Four light beams made up by concyclic four pinholes incident onto hole wall with a large incident angles and their reflected beams form four images on a charge coupled device. From optical relations and picture processings about the images, the value of the diameter is obtained. Being employed ferrules of the optical fiber connecter, etc., as test specimens, some problems about measuring conditions and data processings are experimentally examined and solved. According to actual measurements, the measuring accuracy is estimated to be 2.3 μm(standard deviation) and, under a special condition, 1.4 μm(standard deviation). It is also found that the apparatus can measure specimens without mirror surfaces well.

著者関連情報
© 社団法人 精密工学会
前の記事 次の記事
feedback
Top