Resonance Frequency Change in Microcantilever-Based Sensor due to Humidity Variation

Ratno Nuryadi; Arko Djajadi; Reyhan Adiel; Lia Aprilia; Nuning Aisah

doi:10.4028/www.scientific.net/MSF.737.176

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HomeMaterials Science ForumMaterials Science Forum Vol. 737Resonance Frequency Change in...

Resonance Frequency Change in Microcantilever-Based Sensor due to Humidity Variation

Abstract:

Microcantilever-based sensors have attracted interest in the last decade because of their small size, rapid detection and high sensitivity. This sensor can be applied in the many fields, i.e. physics, chemistry, biology, biochemistry, medical, and environment. In this paper, we describe microcantilever-based sensor for environmental monitoring, especially for a humidity detection. This sensor was operated in dynamic mode where a change in mass or spring constant of the microcantilever provides the resonance frequency change. Here, a change of humidity is detected by the resonance frequency and the amplitude changes. It is found that the increase in the humidity causes the decreasing the resonance frequency but increasing the amplitude. This result opens up the possibility of the humidity detection using microcantilever-based sensor.

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Periodical:

Materials Science Forum (Volume 737)

Pages:

176-182

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.737.176

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Online since:

January 2013

Authors:

Ratno Nuryadi, Arko Djajadi, Reyhan Adiel, Lia Aprilia, Nuning Aisah

Keywords:

Amplitude, Humidity Detection, Microcantilever, Resonance Frequency, Sensor

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